A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Materials selection for thin films for radio frequency microelectromechanical systems
AbstractMaterials selection is an important subject in microtechnology. The methodology developed by Ashby is used here. It is shown that it can be applied easily to microelectromechanical systems (MEMS). Firstly, a selection concerning a minimization of intrinsic residual stresses for thin films deposited by evaporation process is presented. Secondly, the selection of materials to serve in the design of the bridge of a MEMS-RF switch and a MEMS-RF varicap (variable capacitor) is considered.
Materials selection for thin films for radio frequency microelectromechanical systems
AbstractMaterials selection is an important subject in microtechnology. The methodology developed by Ashby is used here. It is shown that it can be applied easily to microelectromechanical systems (MEMS). Firstly, a selection concerning a minimization of intrinsic residual stresses for thin films deposited by evaporation process is presented. Secondly, the selection of materials to serve in the design of the bridge of a MEMS-RF switch and a MEMS-RF varicap (variable capacitor) is considered.
Materials selection for thin films for radio frequency microelectromechanical systems
Guisbiers, G. (author) / Van Overschelde, O. (author) / Wautelet, M. (author)
2006-04-06
4 pages
Article (Journal)
Electronic Resource
English
Materials selection for thin films for radio frequency microelectromechanical systems
| British Library Online Contents | 2007
Ferroelectric Thin Films in Microelectromechanical Systems Applications
| British Library Online Contents | 1996
Piezoelectric aluminum nitride thin films for microelectromechanical systems
| British Library Online Contents | 2012
Microelectromechanical system radio frequency switches in a picosatellite mission
| British Library Online Contents | 2001