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Ferroelectric Thin Films in Microelectromechanical Systems Applications

Polla, D. L. / Francis, L. F.

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Ferroelectric Thin Films in Microelectromechanical Systems Applications

Polla, D. L. / Francis, L. F.

Ferroelectric Thin Films in Microelectromechanical Systems Applications

Polla, D. L. / Francis, L. F.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ferroelectric Thin Films in Microelectromechanical Systems Applications

Contributors:

Polla, D. L. (author) / Francis, L. F. (author) / Auciello, O. / Ramesh, R.

Published in:

Electroceramic Thin Films Part II: Device Applications ; 59-65

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 21

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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