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    The structural deformations in the Si/SiGe system induced by thermal annealing

    New search for: Zheng, S.
    New search for: Mori, M.
    New search for: Tambo, T.
    New search for: Tatsuyama, C.

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    The structural deformations in the Si/SiGe system induced by thermal annealing

    New search for: Zheng, S.
    New search for: Mori, M.
    New search for: Tambo, T.
    New search for: Tatsuyama, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The structural deformations in the Si/SiGe system induced by thermal annealing

    New search for: Zheng, S.
    New search for: Mori, M.
    New search for: Tambo, T.
    New search for: Tatsuyama, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The structural deformations in the Si/SiGe system induced by thermal annealing

    Contributors:

    Zheng, S. (author) / Mori, M. (author) / Tambo, T. (author) / Tatsuyama, C. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 42 ; 5312-5317

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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