Comparison of Graphite and BN/AIN Annealing Caps for Ion Implanted SiC: Fid-Bau Portal

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Comparison of Graphite and BN/AIN Annealing Caps for Ion Implanted SiC

Jones, K. A. / Wood, M. C. / Zheleva, T. S. / Kirchner, K. W. / Derenge, M. A. / Bolonikov, A. / Sudarshan, T. S. / Vispute, R. D. / Hullavarad, S. S. / Dhar, S.

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Comparison of Graphite and BN/AIN Annealing Caps for Ion Implanted SiC

Jones, K. A. / Wood, M. C. / Zheleva, T. S. / Kirchner, K. W. / Derenge, M. A. / Bolonikov, A. / Sudarshan, T. S. / Vispute, R. D. / Hullavarad, S. S. / Dhar, S.

Comparison of Graphite and BN/AIN Annealing Caps for Ion Implanted SiC

Jones, K. A. / Wood, M. C. / Zheleva, T. S. / Kirchner, K. W. / Derenge, M. A. / Bolonikov, A. / Sudarshan, T. S. / Vispute, R. D. / Hullavarad, S. S. / Dhar, S.

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Title:

Comparison of Graphite and BN/AIN Annealing Caps for Ion Implanted SiC

Contributors:

Jones, K. A. (author) / Wood, M. C. (author) / Zheleva, T. S. (author) / Kirchner, K. W. (author) / Derenge, M. A. (author) / Bolonikov, A. (author) / Sudarshan, T. S. (author) / Vispute, R. D. (author) / Hullavarad, S. S. (author) / Dhar, S. (author)

Published in:

Silicon Carbide and Related Materials 2006 ; 575-578

MATERIALS SCIENCE FORUM ; 556/557

Publication date:

2007-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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