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    Oxidation and removal mechanisms during chemical-mechanical planarization

    New search for: Ng, D.
    New search for: Kulkarni, M.
    New search for: Johnson, J.
    New search for: Zinovev, A.
    New search for: Yang, D.
    New search for: Liang, H.

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    Oxidation and removal mechanisms during chemical-mechanical planarization

    New search for: Ng, D.
    New search for: Kulkarni, M.
    New search for: Johnson, J.
    New search for: Zinovev, A.
    New search for: Yang, D.
    New search for: Liang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxidation and removal mechanisms during chemical-mechanical planarization

    New search for: Ng, D.
    New search for: Kulkarni, M.
    New search for: Johnson, J.
    New search for: Zinovev, A.
    New search for: Yang, D.
    New search for: Liang, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Oxidation and removal mechanisms during chemical-mechanical planarization

    Contributors:

    Ng, D. (author) / Kulkarni, M. (author) / Johnson, J. (author) / Zinovev, A. (author) / Yang, D. (author) / Liang, H. (author)

    Published in:

    WEAR -LAUSANNE- ; 263 ; 1477-1483

    Publication date:

    2007-01-01

    Size:

    7 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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