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    High Quality AIN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature

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    New search for: Shu, L.
    New search for: He, L.J.
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    High Quality AIN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature

    New search for: Li, C.
    New search for: Shu, L.
    New search for: He, L.J.
    New search for: Liu, X.Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High Quality AIN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature

    New search for: Li, C.
    New search for: Shu, L.
    New search for: He, L.J.
    New search for: Liu, X.Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High Quality AIN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature

    Contributors:

    Li, C. (author) / Shu, L. (author) / He, L.J. (author) / Liu, X.Z. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 787 ; 227-231

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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