Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films: Fid-Bau Portal

Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films

Lim, W. T. / Stafford, L. / Wright, J. S. / Vossa, L. F. / Khanna, R. / Song, J. I. / Park, J. S. / Heo, Y. W. / Lee, J. H. / Kim, J. J.

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Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films

Lim, W. T. / Stafford, L. / Wright, J. S. / Vossa, L. F. / Khanna, R. / Song, J. I. / Park, J. S. / Heo, Y. W. / Lee, J. H. / Kim, J. J.

Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films

Lim, W. T. / Stafford, L. / Wright, J. S. / Vossa, L. F. / Khanna, R. / Song, J. I. / Park, J. S. / Heo, Y. W. / Lee, J. H. / Kim, J. J.

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Check availability in my library

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Title:

Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films

Contributors:

Lim, W. T. (author) / Stafford, L. (author) / Wright, J. S. (author) / Vossa, L. F. (author) / Khanna, R. (author) / Song, J. I. (author) / Park, J. S. (author) / Heo, Y. W. (author) / Lee, J. H. (author) / Kim, J. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 9228-9233

Publication date:

2007-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Lim, W. T. / Stafford, L. / Song, J. I. et al. | British Library Online Contents | 2007

High-density plasma etching of indium-zinc oxide films in Ar/Cl2 and Ar/CH4/H2 chemistries

Lim, W. T. / Stafford, L. / Song, J. I. et al. | British Library Online Contents | 2006

Dry etching of bulk single-crystal ZnO in CH4/H2-based plasma chemistries

Lim, W. / Voss, L. / Khanna, R. et al. | British Library Online Contents | 2006

Post-deposition annealing of RF-sputtered zinc-oxide films

Bekman, H. H. P. T. / Benoist, K. W. / Joppe, J. L. | British Library Online Contents | 1993

Post-deposition annealing of RF-sputtered zinc-oxide films

Bekman, H. H. P. T. / Benoist, K. W. / Joppe, J. L. | British Library Online Contents | 1993