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    Effect of Substrate Bias on the Properties of Carbon Nitride Films Deposited on Hardalloy by DC Magnetron Sputtering

    New search for: Tang, L.-q.
    New search for: Liu, J.
    New search for: Chen, Z.-g.
    New search for: Chen, C.
    New search for: Wu, Y.-j.

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    Effect of Substrate Bias on the Properties of Carbon Nitride Films Deposited on Hardalloy by DC Magnetron Sputtering

    New search for: Tang, L.-q.
    New search for: Liu, J.
    New search for: Chen, Z.-g.
    New search for: Chen, C.
    New search for: Wu, Y.-j.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Substrate Bias on the Properties of Carbon Nitride Films Deposited on Hardalloy by DC Magnetron Sputtering

    New search for: Tang, L.-q.
    New search for: Liu, J.
    New search for: Chen, Z.-g.
    New search for: Chen, C.
    New search for: Wu, Y.-j.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of Substrate Bias on the Properties of Carbon Nitride Films Deposited on Hardalloy by DC Magnetron Sputtering

    Contributors:

    Tang, L.-q. (author) / Liu, J. (author) / Chen, Z.-g. (author) / Chen, C. (author) / Wu, Y.-j. (author)

    Published in:

    MATERIALS PROTECTION -WUHAN- ; 40 ; 48-50

    Publication date:

    2007-01-01

    Size:

    3 pages

    ISSN:

    1001-1560

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.1

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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