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Fracture of anodic-bonded silicon-thin film glass-silicon triple stacks

Shang, L. Y. / Zhang, Z. L. / Skallerud, B.

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Fracture of anodic-bonded silicon-thin film glass-silicon triple stacks

Shang, L. Y. / Zhang, Z. L. / Skallerud, B.

Fracture of anodic-bonded silicon-thin film glass-silicon triple stacks

Shang, L. Y. / Zhang, Z. L. / Skallerud, B.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fracture of anodic-bonded silicon-thin film glass-silicon triple stacks

Contributors:

Shang, L. Y. (author) / Zhang, Z. L. (author) / Skallerud, B. (author)

Published in:

ENGINEERING FRACTURE MECHANICS ; 75 ; 1064-1082

Publication date:

2008-01-01

Size:

19 pages

ISSN:

0013-7944

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 126

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