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Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta-Si-N thin films
Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta-Si-N thin films
Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta-Si-N thin films
Chung, C.K. (author) / Chen, T.S. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 23 ; 494-499
2008-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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