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Mechanical properties of ion-implanted amorphous silicon

Follstaedt, D. M. / Knapp, J. A. / Myers, S. M.

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Mechanical properties of ion-implanted amorphous silicon

Follstaedt, D. M. / Knapp, J. A. / Myers, S. M.

Mechanical properties of ion-implanted amorphous silicon

Follstaedt, D. M. / Knapp, J. A. / Myers, S. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical properties of ion-implanted amorphous silicon

Contributors:

Follstaedt, D. M. (author) / Knapp, J. A. (author) / Myers, S. M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 338-346

Publication date:

2004-01-01

Size:

9 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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