Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation: Fid-Bau Portal

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

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Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

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Title:

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Contributors:

Ii, S. (author) / Hirota, T. (author) / Fujimoto, K. (author) / Sugimoto, Y. (author) / Takata, N. (author) / Ikeda, K.-i. (author) / Nakashima, H. (author)

Published in:

MATERIALS TRANSACTIONS ; 49 ; 723-727

Publication date:

2008-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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