Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation: Fid-Bau Portal

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

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Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, S. / Hirota, T. / Fujimoto, K. / Sugimoto, Y. / Takata, N. / Ikeda, K.-i. / Nakashima, H.

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Titel:

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Beteiligte:

Ii, S. (Autor:in) / Hirota, T. (Autor:in) / Fujimoto, K. (Autor:in) / Sugimoto, Y. (Autor:in) / Takata, N. (Autor:in) / Ikeda, K.-i. (Autor:in) / Nakashima, H. (Autor:in)

Erschienen in:

MATERIALS TRANSACTIONS ; 49 ; 723-727

Erscheinungsdatum:

01.01.2008

Format / Umfang:

5 pages

ISSN:

1345-9678

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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