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    Evaluation of the barrier capability of Zr-Si films with different substrate temperature for Cu metallization

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    New search for: Cao, F.
    New search for: Ding, M. h.
    New search for: Shao, L.

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    Evaluation of the barrier capability of Zr-Si films with different substrate temperature for Cu metallization

    New search for: Wang, Y.
    New search for: Cao, F.
    New search for: Ding, M. h.
    New search for: Shao, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evaluation of the barrier capability of Zr-Si films with different substrate temperature for Cu metallization

    New search for: Wang, Y.
    New search for: Cao, F.
    New search for: Ding, M. h.
    New search for: Shao, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Evaluation of the barrier capability of Zr-Si films with different substrate temperature for Cu metallization

    Contributors:

    Wang, Y. (author) / Cao, F. (author) / Ding, M. h. (author) / Shao, L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 4738-4741

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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