High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films: Fid-Bau Portal

High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films

Tokumoto, Y. / Shibata, N. / Mizoguchi, T. / Sugiyama, M. / Shimogaki, Y. / Yang, J.-S. / Yamamoto, T. / Ikuhara, Y.

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High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films

Tokumoto, Y. / Shibata, N. / Mizoguchi, T. / Sugiyama, M. / Shimogaki, Y. / Yang, J.-S. / Yamamoto, T. / Ikuhara, Y.

High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films

Tokumoto, Y. / Shibata, N. / Mizoguchi, T. / Sugiyama, M. / Shimogaki, Y. / Yang, J.-S. / Yamamoto, T. / Ikuhara, Y.

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Document information

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Document information

Title:

High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films

Contributors:

Tokumoto, Y. (author) / Shibata, N. (author) / Mizoguchi, T. (author) / Sugiyama, M. (author) / Shimogaki, Y. (author) / Yang, J.-S. (author) / Yamamoto, T. (author) / Ikuhara, Y. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 23 ; 2188-2194

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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