AFM testing of the nanomechanical behaviour of MEMS micromembranes: Fid-Bau Portal

AFM testing of the nanomechanical behaviour of MEMS micromembranes

Ekwinski, G. / Goehlich, A. / Trieu, K. / Rymuza, Z. / Koszewski, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

AFM testing of the nanomechanical behaviour of MEMS micromembranes

Ekwinski, G. / Goehlich, A. / Trieu, K. / Rymuza, Z. / Koszewski, A.

AFM testing of the nanomechanical behaviour of MEMS micromembranes

Ekwinski, G. / Goehlich, A. / Trieu, K. / Rymuza, Z. / Koszewski, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

AFM testing of the nanomechanical behaviour of MEMS micromembranes

Contributors:

Ekwinski, G. (author) / Goehlich, A. (author) / Trieu, K. (author) / Rymuza, Z. (author) / Koszewski, A. (author)

Published in:

INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 99 ; 879-882

Publication date:

2008-01-01

Size:

4 pages

ISSN:

1862-5282

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669.9

Pustan, M. / Ekwinski, G. / Rymuza, Z. | British Library Online Contents | 2007

Microscopy Nanomechanical Testing

Li, X. / Chasiotis, I. / Kitamura, T. | British Library Online Contents | 2010

MEMS-based microstructures for nanomechanical characterization of thin films

Boe, A. / Safi, A. / Coulombier, M. et al. | British Library Online Contents | 2009

Nanomechanical Testing of Gum Metal

Withey, E. A. / Ye, J. / Minor, A. M. et al. | British Library Online Contents | 2010

Nanomechanical fracture-testing of thin films

Kriese, M. D. / Boismier, D. A. / Moody, N. R. et al. | British Library Online Contents | 1998