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An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetron sputtering
An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetron sputtering
An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetron sputtering
Sungthong, A. (author) / Porntheeraphat, S. (author) / Poyai, A. (author) / Nukeaw, J. (author)
APPLIED SURFACE SCIENCE ; 254 ; 7950-7954
2008-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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