Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange: Fid-Bau Portal

Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

Duan, W. / Meng, F. / Bian, J. / Yu, J. / Zhang, L. / Liu, Z.

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Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

Duan, W. / Meng, F. / Bian, J. / Yu, J. / Zhang, L. / Liu, Z.

Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

Duan, W. / Meng, F. / Bian, J. / Yu, J. / Zhang, L. / Liu, Z.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

Contributors:

Duan, W. (author) / Meng, F. (author) / Bian, J. (author) / Yu, J. (author) / Zhang, L. (author) / Liu, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 327 ; 37-42

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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