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Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Hsieh, C. / Yang, C.C. / Huang, C.C. / Chen, C.H.

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Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Hsieh, C. / Yang, C.C. / Huang, C.C. / Chen, C.H.

Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Hsieh, C. / Yang, C.C. / Huang, C.C. / Chen, C.H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Contributors:

Hsieh, C. (author) / Yang, C.C. (author) / Huang, C.C. (author) / Chen, C.H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 594 ; 235-240

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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