Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test: Fid-Bau Portal

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Toujou, F. / Yoshikawa, S. / Homma, Y. / Takano, A. / Takenaka, H. / Tomita, M. / Li, Z. / Hasegawa, T. / Sasakawa, K. / Schuhmacher, M.

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Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Toujou, F. / Yoshikawa, S. / Homma, Y. / Takano, A. / Takenaka, H. / Tomita, M. / Li, Z. / Hasegawa, T. / Sasakawa, K. / Schuhmacher, M.

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Toujou, F. / Yoshikawa, S. / Homma, Y. / Takano, A. / Takenaka, H. / Tomita, M. / Li, Z. / Hasegawa, T. / Sasakawa, K. / Schuhmacher, M.

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Document information

Title:

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Contributors:

Toujou, F. (author) / Yoshikawa, S. (author) / Homma, Y. (author) / Takano, A. (author) / Takenaka, H. (author) / Tomita, M. (author) / Li, Z. (author) / Hasegawa, T. (author) / Sasakawa, K. (author) / Schuhmacher, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 649-652

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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