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Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source

Ravanel, X. / Trouiller, C. / Juhel, M. / Wyon, C. / Kwakman, L. F. / Leonard, D.

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Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source

Ravanel, X. / Trouiller, C. / Juhel, M. / Wyon, C. / Kwakman, L. F. / Leonard, D.

Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source

Ravanel, X. / Trouiller, C. / Juhel, M. / Wyon, C. / Kwakman, L. F. / Leonard, D.

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Check availability in my library

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Document information

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Document information

Title:

Static time-of-flight secondary ion mass spectrometry analysis of microelectronics related substrates using a polyatomic ion source

Contributors:

Ravanel, X. (author) / Trouiller, C. (author) / Juhel, M. (author) / Wyon, C. (author) / Kwakman, L. F. (author) / Leonard, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1440-1442

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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