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Modifying the properties of fluorinated amorphous films using argon by filtered cathodic vacuum arc

Lin, Y. H. / Syue, Y. C. / Lin, H. D. / Chen, U. S. / Chang, Y. S. / Chen, J. R. / Shih, H. C.

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Modifying the properties of fluorinated amorphous films using argon by filtered cathodic vacuum arc

Lin, Y. H. / Syue, Y. C. / Lin, H. D. / Chen, U. S. / Chang, Y. S. / Chen, J. R. / Shih, H. C.

Modifying the properties of fluorinated amorphous films using argon by filtered cathodic vacuum arc

Lin, Y. H. / Syue, Y. C. / Lin, H. D. / Chen, U. S. / Chang, Y. S. / Chen, J. R. / Shih, H. C.

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Document information

Title:

Modifying the properties of fluorinated amorphous films using argon by filtered cathodic vacuum arc

Contributors:

Lin, Y. H. (author) / Syue, Y. C. (author) / Lin, H. D. (author) / Chen, U. S. (author) / Chang, Y. S. (author) / Chen, J. R. (author) / Shih, H. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 2139-2142

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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