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Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
Li, Z. G. (author) / Miyake, S. (author) / Makino, M. (author) / Wu, Y. X. (author)
APPLIED SURFACE SCIENCE ; 255 ; 2370-2374
2008-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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