Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance: Fid-Bau Portal

Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Bogdanowicz, J. / Dortu, F. / Clarysse, T. / Vandervorst, W. / Shaughnessy, D. / Salnik, A. / Nicolaides, L.

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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Bogdanowicz, J. / Dortu, F. / Clarysse, T. / Vandervorst, W. / Shaughnessy, D. / Salnik, A. / Nicolaides, L.

Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Bogdanowicz, J. / Dortu, F. / Clarysse, T. / Vandervorst, W. / Shaughnessy, D. / Salnik, A. / Nicolaides, L.

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Title:

Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance

Contributors:

Bogdanowicz, J. (author) / Dortu, F. (author) / Clarysse, T. (author) / Vandervorst, W. (author) / Shaughnessy, D. (author) / Salnik, A. (author) / Nicolaides, L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 234-239

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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