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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, J. (Autor:in) / Dortu, F. (Autor:in) / Clarysse, T. (Autor:in) / Vandervorst, W. (Autor:in) / Shaughnessy, D. (Autor:in) / Salnik, A. (Autor:in) / Nicolaides, L. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 234-239
01.01.2008
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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