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Segregation of antimony to Si/SiO2 interfaces
Segregation of antimony to Si/SiO2 interfaces
Segregation of antimony to Si/SiO2 interfaces
Steen, C. (author) / Pichler, P. (author) / Ryssel, H. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 264-267
2008-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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