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Atomic structure of SiO2 at SiO2/Si interfaces

Hirose, K. / Nohira, H. / Sakano, K. / Hattori, T.

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Atomic structure of SiO2 at SiO2/Si interfaces

Hirose, K. / Nohira, H. / Sakano, K. / Hattori, T.

Atomic structure of SiO2 at SiO2/Si interfaces

Hirose, K. / Nohira, H. / Sakano, K. / Hattori, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Atomic structure of SiO2 at SiO2/Si interfaces

Contributors:

Hirose, K. (author) / Nohira, H. (author) / Sakano, K. (author) / Hattori, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 166 ; 455-459

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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