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    Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study

    New search for: Ignatova, V.
    New search for: Chakarov, I.
    New search for: Torrisi, A.
    New search for: Licciardello, A.

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    Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study

    New search for: Ignatova, V.
    New search for: Chakarov, I.
    New search for: Torrisi, A.
    New search for: Licciardello, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study

    New search for: Ignatova, V.
    New search for: Chakarov, I.
    New search for: Torrisi, A.
    New search for: Licciardello, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study

    Contributors:

    Ignatova, V. (author) / Chakarov, I. (author) / Torrisi, A. (author) / Licciardello, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 187 ; 145-153

    Publication date:

    2002-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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