Segregation of phosphorus to SiO2/Si(001) interfaces: Fid-Bau Portal

Segregation of phosphorus to SiO2/Si(001) interfaces

Dabrowski, J. / Mussig, H. J. / Baierle, R. / Caldas, M. J. / Zavodinsky, V.

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Segregation of phosphorus to SiO2/Si(001) interfaces

Dabrowski, J. / Mussig, H. J. / Baierle, R. / Caldas, M. J. / Zavodinsky, V.

Segregation of phosphorus to SiO2/Si(001) interfaces

Dabrowski, J. / Mussig, H. J. / Baierle, R. / Caldas, M. J. / Zavodinsky, V.

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Check availability in my library

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Document information

Title:

Segregation of phosphorus to SiO2/Si(001) interfaces

Contributors:

Dabrowski, J. (author) / Mussig, H. J. (author) / Baierle, R. (author) / Caldas, M. J. (author) / Zavodinsky, V. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 85-89

Publication date:

2000-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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