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Nanostructured CrAlN Films Prepared at Different Pulse Widths by Pulsed DC Reactive Sputtering in Facing Target Type System
Nanostructured CrAlN Films Prepared at Different Pulse Widths by Pulsed DC Reactive Sputtering in Facing Target Type System
Nanostructured CrAlN Films Prepared at Different Pulse Widths by Pulsed DC Reactive Sputtering in Facing Target Type System
Khamseh, S. (author) / Nose, M. (author) / Ueda, S. (author) / Kawabata, T. (author) / Nagae, T. (author) / Matsuda, K. (author) / Ikeno, S. (author)
MATERIALS TRANSACTIONS ; 49 ; 2737-2742
2008-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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