Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System: Fid-Bau Portal

Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

Khamseh, S. / Nose, M. / Kawabata, T. / Matsuda, K. / Ikeno, S.

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Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

Khamseh, S. / Nose, M. / Kawabata, T. / Matsuda, K. / Ikeno, S.

Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

Khamseh, S. / Nose, M. / Kawabata, T. / Matsuda, K. / Ikeno, S.

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Check availability in my library

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Document information

Title:

Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System

Contributors:

Khamseh, S. (author) / Nose, M. (author) / Kawabata, T. (author) / Matsuda, K. (author) / Ikeno, S. (author)

Published in:

MATERIALS TRANSACTIONS ; 51 ; 271-276

Publication date:

2010-01-01

Size:

6 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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