Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition: Fid-Bau Portal

Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Baba, S. / Park, J.H. / Sato, H. / Nakano, S. / Ashida, K. / Akedo, J.

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Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Baba, S. / Park, J.H. / Sato, H. / Nakano, S. / Ashida, K. / Akedo, J.

Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Baba, S. / Park, J.H. / Sato, H. / Nakano, S. / Ashida, K. / Akedo, J.

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Check availability in my library

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Document information

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Document information

Title:

Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Contributors:

Baba, S. (author) / Park, J.H. (author) / Sato, H. (author) / Nakano, S. (author) / Ashida, K. (author) / Akedo, J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 388 ; 195-200

Publication date:

2009-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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