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    Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

    New search for: Takahashi, H.
    New search for: Tian, Y.B.
    New search for: Mikami, Y.
    New search for: Shimizu, J.
    New search for: Zhou, L.
    New search for: Tashiro, Y.
    New search for: Iwase, H.
    New search for: Kamiya, S.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

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    Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

    New search for: Takahashi, H.
    New search for: Tian, Y.B.
    New search for: Mikami, Y.
    New search for: Shimizu, J.
    New search for: Zhou, L.
    New search for: Tashiro, Y.
    New search for: Iwase, H.
    New search for: Kamiya, S.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

    New search for: Takahashi, H.
    New search for: Tian, Y.B.
    New search for: Mikami, Y.
    New search for: Shimizu, J.
    New search for: Zhou, L.
    New search for: Tashiro, Y.
    New search for: Iwase, H.
    New search for: Kamiya, S.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer

    Contributors:

    Takahashi, H. (author) / Tian, Y.B. (author) / Mikami, Y. (author) / Shimizu, J. (author) / Zhou, L. (author) / Tashiro, Y. (author) / Iwase, H. (author) / Kamiya, S. (author) / Zhao, J. / Kunieda, M.

    Published in:

    Advances in Precision Engineering ; 106-110

    KEY ENGINEERING MATERIALS ; 447/448

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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