Correlation between Thermal Oxide Breakdown and Defects in n-Type 4H-SiC Epitaxial Wafers

Soloviev, S. / Matocha, K. / Dunne, G. et al. | British Library Online Contents | 2009

Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation

Sudarshan, T.S. / Soloviev, S. / Khlebnikov, I. et al. | British Library Online Contents | 1999

Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers

Borionetti, G. / Gambaro, D. / Santi, S. et al. | British Library Online Contents | 2000

Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996

Interface Defects of Bonded Silicon Wafers

Reiche, M. / Tong, Q.-Y. / Goesele, U. et al. | British Library Online Contents | 1995