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Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Sudarshan, T.S. (author) / Soloviev, S. (author) / Khlebnikov, I. (author) / Madangarli, V. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 464 - 467
1999-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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