Impact of RIE Etching on the Breakdown Voltage of 4H-SiC Mesa Diodes: Fid-Bau Portal

Impact of RIE Etching on the Breakdown Voltage of 4H-SiC Mesa Diodes

Vang, H. / Scharnholz, S. / Raynaud, C. / Lazar, M. / Paques, G. / Planson, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Impact of RIE Etching on the Breakdown Voltage of 4H-SiC Mesa Diodes

Vang, H. / Scharnholz, S. / Raynaud, C. / Lazar, M. / Paques, G. / Planson, D.

Impact of RIE Etching on the Breakdown Voltage of 4H-SiC Mesa Diodes

Vang, H. / Scharnholz, S. / Raynaud, C. / Lazar, M. / Paques, G. / Planson, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Impact of RIE Etching on the Breakdown Voltage of 4H-SiC Mesa Diodes

Contributors:

Vang, H. (author) / Scharnholz, S. (author) / Raynaud, C. (author) / Lazar, M. (author) / Paques, G. (author) / Planson, D. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 1011-1014

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Camara, N. / Thuaire, A. / Bano, E. et al. | British Library Online Contents | 2005

Investigation of Epitaxial SiC PiN Diodes with Variable Mesa Height

Paques, G. / Scharnholz, S. / Konrath, J.P. et al. | British Library Online Contents | 2011

6H-SiC Schottky Barrier Diodes with Nearly Ideal Breakdown Voltage

Brezeanu, G. / Badila, M. / Millan, J. et al. | British Library Online Contents | 2000

Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

Hiller, L. / Stauden, T. / Kemper, R.M. et al. | British Library Online Contents | 2014

HBV deep mesa etching in InGaAs/InAlAs/AlAs heterostructures on InP substrate

Gorska, M. / Wrzesinska, H. / Szerling, A. et al. | British Library Online Contents | 2005