Effect of N~2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films: Fid-Bau Portal

Effect of N~2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films

Cai, W.-h. / Huang, J.-h. / Li, D.-s. / Yang, D.-r.

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Effect of N~2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films

Cai, W.-h. / Huang, J.-h. / Li, D.-s. / Yang, D.-r.

Effect of N~2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films

Cai, W.-h. / Huang, J.-h. / Li, D.-s. / Yang, D.-r.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of N~2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films

Contributors:

Cai, W.-h. (author) / Huang, J.-h. (author) / Li, D.-s. (author) / Yang, D.-r. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 27 ; 132-134

Publication date:

2009-01-01

Size:

3 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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