Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Copper in silicon: quantitative analysis of internal and proximity gettering

McHugo, S. A. / Heiser, T. / Hieslmair, H. et al. | British Library Online Contents | 1997

Competition between internal and heavy doping gettering options in epi-silicon

Frigeri, C. / Gombia, E. / Motta, A. | British Library Online Contents | 2006

Oxygen precipitation and improved internal gettering in heavily As-doped silicon crystal

Hao, Q. / Liu, C. / Zhang, H. et al. | British Library Online Contents | 2006

Phosphorus Diffusion Gettering of Gold in Silicon

Sveinbjoernsson, E. O. / Engstroem, O. / Soedervall, U. | British Library Online Contents | 1993