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    Heat transfer analysis during a curing process for UV nanoimprint lithography

    New search for: Park, I.
    New search for: Lim, S. H.
    New search for: Shin, D.
    New search for: Lee, K. S.
    New search for: Jang, S.
    New search for: Yim, H. J.
    New search for: Won, C.
    New search for: Jeong, J. I.

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    Heat transfer analysis during a curing process for UV nanoimprint lithography

    New search for: Park, I.
    New search for: Lim, S. H.
    New search for: Shin, D.
    New search for: Lee, K. S.
    New search for: Jang, S.
    New search for: Yim, H. J.
    New search for: Won, C.
    New search for: Jeong, J. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Heat transfer analysis during a curing process for UV nanoimprint lithography

    New search for: Park, I.
    New search for: Lim, S. H.
    New search for: Shin, D.
    New search for: Lee, K. S.
    New search for: Jang, S.
    New search for: Yim, H. J.
    New search for: Won, C.
    New search for: Jeong, J. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Heat transfer analysis during a curing process for UV nanoimprint lithography

    Contributors:

    Park, I. (author) / Lim, S. H. (author) / Shin, D. (author) / Lee, K. S. (author) / Jang, S. (author) / Yim, H. J. (author) / Won, C. (author) / Jeong, J. I. (author)

    Published in:

    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 23 ; 927-930

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    1738-494X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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