Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition: Fid-Bau Portal

Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

VanMil, B.L. / Stahlbush, R.E. / Myers-Ward, R.L. / Picard, Y.N. / Kitt, S.A. / McCrate, J.M. / Katz, S.L. / Gaskill, D.K. / Eddy, C.R.

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Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

VanMil, B.L. / Stahlbush, R.E. / Myers-Ward, R.L. / Picard, Y.N. / Kitt, S.A. / McCrate, J.M. / Katz, S.L. / Gaskill, D.K. / Eddy, C.R.

Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

VanMil, B.L. / Stahlbush, R.E. / Myers-Ward, R.L. / Picard, Y.N. / Kitt, S.A. / McCrate, J.M. / Katz, S.L. / Gaskill, D.K. / Eddy, C.R.

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Title:

Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

Contributors:

VanMil, B.L. (author) / Stahlbush, R.E. (author) / Myers-Ward, R.L. (author) / Picard, Y.N. (author) / Kitt, S.A. (author) / McCrate, J.M. (author) / Katz, S.L. (author) / Gaskill, D.K. (author) / Eddy, C.R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 61-66

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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