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Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z. H. / Sudarshan, T. S.

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Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z. H. / Sudarshan, T. S.

Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z. H. / Sudarshan, T. S.

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Document information

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Document information

Title:

Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Contributors:

Zhang, Z. H. (author) / Sudarshan, T. S. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 243-246

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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