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Chloride-Based SiC Epitaxial Growth

Pedersen, H. / Leone, S. / Henry, A. / Beyer, F.C. / Lundskog, A. / Janzen, E.

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Chloride-Based SiC Epitaxial Growth

Pedersen, H. / Leone, S. / Henry, A. / Beyer, F.C. / Lundskog, A. / Janzen, E.

Chloride-Based SiC Epitaxial Growth

Pedersen, H. / Leone, S. / Henry, A. / Beyer, F.C. / Lundskog, A. / Janzen, E.

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Check availability in my library

Order at Subito €

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Document information

Title:

Chloride-Based SiC Epitaxial Growth

Contributors:

Pedersen, H. (author) / Leone, S. (author) / Henry, A. (author) / Beyer, F.C. (author) / Lundskog, A. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 89-92

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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