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Concentrated Chloride-Based Epitaxial Growth of 4H-SiC
Concentrated Chloride-Based Epitaxial Growth of 4H-SiC
Concentrated Chloride-Based Epitaxial Growth of 4H-SiC
Henry, A. (author) / Leone, S. (author) / Andersson, S. (author) / Kordina, O. (author) / Janzen, E. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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