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PL Imaging Study of In-Grown Stacking Faults in 4H-SiC Epitaxial Layer
PL Imaging Study of In-Grown Stacking Faults in 4H-SiC Epitaxial Layer
PL Imaging Study of In-Grown Stacking Faults in 4H-SiC Epitaxial Layer
Hattori, R. (author) / Shimizu, R. (author) / Chiba, I. (author) / Hamano, K. (author) / Oomori, T. (author)
MATERIALS SCIENCE FORUM ; 615/617 ; 129-132
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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