P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001): Fid-Bau Portal

P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001)

Wagner, G. / Schmidbauer, M. / Irmscher, K. / Tanner, P. / Fornari, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001)

Wagner, G. / Schmidbauer, M. / Irmscher, K. / Tanner, P. / Fornari, R.

P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001)

Wagner, G. / Schmidbauer, M. / Irmscher, K. / Tanner, P. / Fornari, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001)

Contributors:

Wagner, G. (author) / Schmidbauer, M. (author) / Irmscher, K. (author) / Tanner, P. (author) / Fornari, R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 165-168

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Danielsson, O. / Forsberg, U. / Janzen, E. | British Library Online Contents | 2003

Arsenic incorporation and doping behaviour in silicon and SiGe epitaxial layers grown by gas source molecular beam epitaxy

Fernandez, J. M. / Xie, M. H. / Matsumura, A. et al. | British Library Online Contents | 1995

Evaluation of p-Type Doping for (1120) Epitaxial Layers Grown on alpha-Cut (1120) 4H-SiC Substrates

Blanc, C. / Zielinski, M. / Souliere, V. et al. | British Library Online Contents | 2005

Orientation-Dependent Defect Formation in Silicon Carbide Epitaxial Layers

Yakimova, R. / Syvajarvi, M. / Iakimov, T. et al. | British Library Online Contents | 2003

Characterisation of epitaxial layers on silicon by spectroscopic ellipsometry

Dittmar, G. / Gruska, B. | British Library Online Contents | 2000