Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers: Fid-Bau Portal

Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers

Chung, G.Y. / Loboda, M.J. / MacMillan, M.F. / Wan, J.W.

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Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers

Chung, G.Y. / Loboda, M.J. / MacMillan, M.F. / Wan, J.W.

Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers

Chung, G.Y. / Loboda, M.J. / MacMillan, M.F. / Wan, J.W.

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Document information

Title:

Wafer Level Recombination Carrier Lifetime Measurements of 4H-SiC PiN Epitaxial Wafers

Contributors:

Chung, G.Y. (author) / Loboda, M.J. (author) / MacMillan, M.F. (author) / Wan, J.W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 287-290

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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