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Replication of mold for UV-nanoimprint lithography using AAO membrane

Zhou, W. / Zhang, J. / Li, X. / Liu, Y. / Min, G. / Song, Z.

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Replication of mold for UV-nanoimprint lithography using AAO membrane

Zhou, W. / Zhang, J. / Li, X. / Liu, Y. / Min, G. / Song, Z.

Replication of mold for UV-nanoimprint lithography using AAO membrane

Zhou, W. / Zhang, J. / Li, X. / Liu, Y. / Min, G. / Song, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Replication of mold for UV-nanoimprint lithography using AAO membrane

Contributors:

Zhou, W. (author) / Zhang, J. (author) / Li, X. (author) / Liu, Y. (author) / Min, G. (author) / Song, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 8019-8022

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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