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Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Ro, H. W. (author) / Popova, V. (author) / Chen, L. (author) / Forster, A. M. (author) / Ding, Y. (author) / Alvine, K. J. (author) / Krug, D. J. (author) / Laine, R. M. (author) / Soles, C. L. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 414-420
2011-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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