A platform for research: civil engineering, architecture and urbanism
Planarization machining of sapphire wafers with boron carbide and colloidal silica as abrasives
Planarization machining of sapphire wafers with boron carbide and colloidal silica as abrasives
Planarization machining of sapphire wafers with boron carbide and colloidal silica as abrasives
APPLIED SURFACE SCIENCE ; 255 ; 8230-8234
2009-01-01
5 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 2017
|British Library Online Contents | 2017
|Machining Mechanisms of Si Wafers in Mechanochemical Polishing by Soft Abrasives
British Library Online Contents | 2005
|British Library Online Contents | 2016
|British Library Online Contents | 2016
|