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Titanium and aluminum nitride synthesis via layer by layer LA-CVD

Shishkovsky, I. / Morozov, Y. / Yadroitsev, I. / Smurov, I.

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Titanium and aluminum nitride synthesis via layer by layer LA-CVD

Shishkovsky, I. / Morozov, Y. / Yadroitsev, I. / Smurov, I.

Titanium and aluminum nitride synthesis via layer by layer LA-CVD

Shishkovsky, I. / Morozov, Y. / Yadroitsev, I. / Smurov, I.

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Document information

Title:

Titanium and aluminum nitride synthesis via layer by layer LA-CVD

Contributors:

Shishkovsky, I. (author) / Morozov, Y. (author) / Yadroitsev, I. (author) / Smurov, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 9847-9850

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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